00326nam a2200109Ia 4500008004100000020001800041040002900059050002700088100002100115245005000136260003000186230222s9999||||xx |||||||||||||| ||und||  a0 07 058502 4  cChuka University Library  aSBL TA 418.9bS65 1995  aSmith, Donald L. 0aThin-Film deposition:principles and practice   aMcGrawhill bBostonc1995