01007cam a2200265 a 45000010008000000030004000080050017000120080041000290100017000700200015000870200035001020400060001370500024001971000047002212450072002682600036003403000048003765040051004246500016004756500019004916500023005106500031005338560073005648560104006374908719OSt20241025120245.0941220s1995    nyua     b    001 0 eng    a   94047002   a0070585024  a0071139133 (International ed.)  aDLCcChuka University LibrarydChuka University Library00aTA 418.9b.S65 19951 aSmith, Donald L.q(Donald Leonard),d1944-10aThin-film deposition :bprinciples and practice /cDonald L. Smith.  aNew York :bMcGraw-Hill,c1995.  axxiii, 616 pages :billustrations ;c24 cm.  aIncludes bibliographical references and index. 0aThin films. 0aVapor-plating. 0aThin film devices. 0aChemical vapour deposition413Table of contentsuhttp://www.loc.gov/catdir/toc/mh022/94047002.html423Contributor biographical informationuhttp://www.loc.gov/catdir/enhancements/fy1012/94047002-b.html